XY Micro Linear Positioning Platform LMA65
Min. Order (MOQ)
1
Lead Time
2 Weeks
Ref. Price
Latest Price
Product Overview:
This miniature XY platform is tailored for semiconductor and micro-assembly equipment.
Product Description
This miniature XY platform is tailored for semiconductor and micro-assembly equipment. It uses square linear motors for stable, repeatable movement. Suitable for precision positioning over short travel ranges. Compact design supports installation in limited workspaces. Commonly applied in photonics, laser optics, and nanotechnology fields.
Product Detail
Characteristic:
1. Fast response, higher acceleration (up to 25G) and shorter settling time, increase production efficiency.
2. High speed, up to 5m/s, reduce the production cycle.
3. High rigidity, direct drive load, no need for mechanical transmission such as gears, belts, ball screws etc.
4. High accuracy, direct measurement system, no distance/Angle conversion required.
5. No backlash, directly coupled power driven load, no mechanical conversion.
Motor and Stage Specifications
| Model： | LMA65-10-XXX–A | |
| G01 | Grating feedback, resolution: 0.1μm | |
| G05 | Grating feedback, resolution: 0.5μm | |
| Motor specifications | ||
| Units | Value | |
| Continuous Force (Tmax） | N | 3.5 |
| Peak Force | N | 24.5 |
| Motor Constant | N√W | 1.82 |
| Max.Continuous Power Dissipation | W | 3.68 |
| Continuous Current (Tmax） | Arms | 0.6 |
| Peak Current (1S) | Arms | 4.2 |
| Force Constant (25℃，±5%） | N/Arms | 5.8 |
| Back EMF Constant (25℃，±5%） | Vrms/m/s | 1.9 |
| Electrical Resistance(25℃，±5%）P-P | Ω | 4.87 |
| Inductance(25℃，±20%）P-P | μm | 0.1 |
| Max Coil Temperature | ℃ | 120 |
| Polar Distance (N-N) (360℃ Electrical cycle) | mm | 36 |
| Magnetic Attraction | N | 67 |
| Stage specifications | ||
| Units | Value | |
| Max. Load | kg | 2.4 |
| Effective Stroke | mm | 10 |
| Resolution | μm | 0.1 |
| Max.Speed（1） | mm/s | 270 |
| Repeat accuracy | μm | ±0.5 |
| Weight | kg | 0.25 |
|
Working environment temperature
and humidity
|
0-40℃、20-80%RH | |
Installation dimensions
Appliaction Case
Assembly into XY cross stage and applied in wire bonder.
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Packaging & Delivery
Packaging Details.: plywood packing
Port.: Shenzhen ( Sea / Air shipping, TNT, UPS, FedEx and DHL ect.)
Leading time: According to the order quantity, 10 days for the small order and 20 days for the bulk order
