Precision-class miniature linear stage
The miniature linear stage has an ironless linear motor that ensures smooth running. The combination of stress-relieved aluminum base ensures good performance data. Built-in high precision grating, repeated accuracy up to ±1μm.
Application fields
Industry and research. Metrology. Photonics and precision scanning in semiconductor or flat panel display manufacturing.
Motor and Stage Specifications
| Model: |
LMA55-25-XXX–A |
| G01 |
Grating feedback, resolution: 0.1μm |
| G05 |
Grating feedback, resolution: 0.5μm |
| Motor specifications |
| |
Units |
Value |
| Continuous Force (Tmax) |
N |
8 |
| Peak Force |
N |
32 |
| Motor Constant |
N√W |
1.74 |
| Max.Continuous Power Dissipation |
W |
21.1 |
| Continuous Current (Tmax) |
Arms |
0.8 |
| Peak Current (1S) |
Arms |
3.2 |
| Force Constant (25℃,±5%) |
N/Arms |
10.0 |
| Back EMF Constant (25℃,±5%) |
Vrms/m/s |
3.3 |
| Electrical Resistance(25℃,±5%)P-P |
Ω |
15.7 |
| Inductance(25℃,±20%)P-P |
μm |
0.43 |
| Max Coil Temperature |
℃ |
120 |
| Polar Distance (N-N) (360℃ Electrical cycle) |
mm |
36 |
| Magnetic Attraction |
N |
84 |
| Stage specifications |
| |
Units |
Value |
| Max. Load |
kg |
3.5 |
| Effective Stroke |
mm |
25 |
| Resolution |
μm |
0.1 |
| Max.Speed(1) |
mm/s |
700 |
| Repeat accuracy |
μm |
±0.5 |
| Weight |
kg |
0.5 |
|
Working environment temperature
and humidity
|
0-40℃、20-80%RH |
Dimensions

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Packaging & Delivery
Packaging Details.: plywood packing
Port.: Shenzhen ( Sea / Air shipping, TNT, UPS, FedEx and DHL ect.)
Leading time: According to the order quantity, 10 days for the small order and 20 days for the bulk order