Air bearing Stage

Feature:

1.Extremely Low Friction Coefficient (~0.0005) – Ensures long service life, high stability, low noise, and exceptional manufacturing accuracy, while reducing driving power requirements.

2.Non-Contact Air Bearing Guide – Provides frictionless, smooth, and wear-free motion for high-precision positioning.

3.High Straightness & Flatness – Guarantees accurate movement and repeatable performance in semiconductor and electronics applications.

4.Long Travel Range (up to 1 meter) – Supports large-scale motion applications without sacrificing precision.

5.Nano-Level Micro-Step Resolution – Enables ultra-fine positioning and high-precision inspection tasks.

6.Closed-Loop Feedback with Grating Encoder – Ensures real-time monitoring, stable motion, and high repeatability for demanding manufacturing processes.

Highlights:

· Ultra-Low Friction Contactless Motion – Air bearing design reduces wear, noise, and driving power, ensuring long-lasting precision.

· High Precision & Stability – Nano-level resolution and superior straightness/flatness deliver consistent, repeatable positioning.

· Closed-Loop Feedback Control – Integrated grating encoder enables real-time monitoring and accurate motion control.

· Extended Travel Range – Supports large-scale movements up to 1 meter without sacrificing accuracy.

· Ideal for Semiconductor & Electronics Manufacturing – Perfect for inspection, measurement, and high-precision positioning tasks.

· Smooth & Reliable Operation – Non-contact air bearing guide ensures frictionless, wear-free motion for long-term applications.

Application:

1. Semiconductor manufacturing: lithography systems, wafer inspection equipment, and packaging equipment.
2. Precision metrology and inspection: ultra-precision coordinate measuring machines (CMM), roundness measuring instruments, cylindricity measuring instruments, and surface profilometers.
3. Optics and photonics: laser processing equipment and optical component inspection platforms.
4. Flat panel display (FPD) manufacturing: production and inspection equipment for LCD and OLED panels.
5. High-end additive manufacturing: industrial-grade 3D printers.
6. Biotechnology and life sciences: gene sequencers and high-throughput screening systems.

Specification

Product Dimension